The XSP-3 was designed to measure several positions along an X axis of 1 or several DUTs.

It is a very fast equipment which provides spectral measurements with a spatial resolution of 1.5µm.


The XSP-3 uses an XScope system with automatized Y axis with manual Z axis to measure color & luminance information of the DUT.


  • High magnification and ultra large field of view
  • Spatial resolution of 1.5µm
  • Automatic focus and tilt correction
  • gSOAP toolkit, innovative multi-OS software development platform


  • Micro display inspection
  • Detailed pixel sub-structure studies
  • LEDs die inspection
  • Any photometry application down to the micrometer scales

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