The XSP-4 is designed to measure several positions along the XY axis of 1 or several DUTs.

It is an equipment which does spectral measurements with a very precise spectrometer at a spatial resolution of 1.5µm.


The XSP-4 uses an XScope system with automated XYZ axis to measure spectral information of the DUT. This system allows spectral measurements with a 5 nm resolution.


  • High magnification and ultra-large field of view
  • Spatial resolution of 1.5µm
  • Automatic focus and tilt correction
  • gSOAP toolkit, innovative multi-OS software development platform


  • Micro display inspection
  • Detailed pixel sub-structure studies
  • LEDs die inspection
  • Any photometry application down to the micrometer scales

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